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Scott A. (Almaden Research Center) MacDonald

Scott A. (Almaden Research Center) MacDonald

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Polymers in Microlithography
Polymers in Microlithography
By: Takao Iwayanagi, Elsa Reichmanis, Elsa (AT&T Bell Laboratories) Reichmanis, Scott A. (Almaden Research Center) MacDonald, Takao (Hitachi Central Research Laboratories) Iwayanagi
Publisher: American Chemical Society
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AED476
Binding:
Hardback
Release:
05 May 1989
Language:
English
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